ISO 14644-14:2016 - $138.00   BUY NOW

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

ISO 14644-14:2016 Publication Description:

ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644‑1. Particle sizes range from 0,1 ¦m to equal to or larger than 5 ¦m (given in ISO 14644‑1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this ISO 14644-14:2016:

- assessment of suitability with respect to biocontamination;

- testing for suitability of decontamination agents and techniques;

- cleanability of equipment and materials;

- requirements on design of equipment and selection of materials;

- physical properties of materials (e.g. electrostatic, thermal properties);

- optimizing performance of equipment for specific process applications;

- selection and use of statistical methods for testing;

- protocols and requirements for local safety regulations.

International Classification for Standards (ICS)

ICS Classification Field ICS Field Sub-Group and Number
ICS-13-Environment ICS Cleanrooms (13.040.35)

ICS Related Standards

Cart Document Number Document Title
$185.00 ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
$123.00 ISO 14644-1:1999 Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness
$162.00 ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
$103.00 ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
$88.00 ISO 14644-2:2000 Cleanrooms and associated controlled environments -- Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
$209.00 ISO 14644-3:2005 Cleanrooms and associated controlled environments - Part 3: Test methods
$209.00 ISO 14644-4:2001 Cleanrooms and associated controlled environments -- Part 4: Design, construction and start-up
$185.00 ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Operations
$209.00 ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
$138.00 ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
$138.00 ISO 14644-9:2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
$162.00 ISO 14698-1:2003 Cleanrooms and associated controlled environments -- Biocontamination control -- Part 1: General principles and methods
$68.00 ISO 14698-2:2003 Cleanrooms and associated controlled environments - Biocontamination control - Part 2: Evaluation and interpretation of biocontamination data
$145.00 JIS B 9917-3:2009 Cleanrooms and associated controlled environments -- Part 3: Test methods
$162.00 ISO 14644-13:2017 Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications