ISO 14644-13:2017 - $162.00   BUY NOW

Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

ISO 14644-13:2017 Publication Description:

ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.

The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644‑9 and ISO 14644‑10.

The following matters of general guidance will be provided:

- expected surface cleanliness levels;

- suitability of cleaning methods;

- compatibility of surfaces with the cleaning technique;

- assessment of cleaning appropriateness.

The following will be excluded from this document:

- classification of cleaning methods;

- product produced within a cleanroom;

- specific surface-related cleaning methods;

- detailed description of cleaning mechanisms, methods and procedures of various cleaning methods;

- detailed material characteristics;

- description of damage mechanisms by cleaning processes and time-dependent effects;

- references to interactive bonding forces between contaminants and surfaces or generation processes that are usually time-dependent and process-dependent;

- other characteristics of particles such as electrostatic charge, ionic charges, etc.;

- chemical reactions between molecular contaminants and surfaces;

- microbiological aspects of surface cleanliness;

- radioactive aspects of contamination;

- health and safety considerations;

- environmental aspects such as waste disposal, emissions, etc.;

- selection and use of statistical methods.

International Classification for Standards (ICS)

ICS Classification Field ICS Field Sub-Group and Number
ICS-13-Environment ICS Cleanrooms (13.040.35)

ICS Related Standards

Cart Document Number Document Title
$185.00 ISO 14644-1:2015 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
$123.00 ISO 14644-1:1999 Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness
$162.00 ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
$138.00 ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
$103.00 ISO 14644-2:2015 Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
$88.00 ISO 14644-2:2000 Cleanrooms and associated controlled environments -- Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
$209.00 ISO 14644-3:2005 Cleanrooms and associated controlled environments - Part 3: Test methods
$209.00 ISO 14644-4:2001 Cleanrooms and associated controlled environments -- Part 4: Design, construction and start-up
$185.00 ISO 14644-5:2004 Cleanrooms and associated controlled environments - Part 5: Operations
$209.00 ISO 14644-7:2004 Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
$138.00 ISO 14644-8:2013 Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
$138.00 ISO 14644-9:2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
$162.00 ISO 14698-1:2003 Cleanrooms and associated controlled environments -- Biocontamination control -- Part 1: General principles and methods
$68.00 ISO 14698-2:2003 Cleanrooms and associated controlled environments - Biocontamination control - Part 2: Evaluation and interpretation of biocontamination data
$145.00 JIS B 9917-3:2009 Cleanrooms and associated controlled environments -- Part 3: Test methods